CBM (Condition-Based Maintenance) System Framework and Products
With the implementation of the proposed PHM system as shown in the above figure, domain knowledge stored in the PHM-Equip and PHM-APC subsystems will feed forward and feed backward through the entire process flow. For example, device information from the PHM-BE subsystems will be easily shared with process and equipment engineers. Likewise, process information from PHM-Equip and PHM-APC subsystems can also be shared with Device and Test engineers to achieve a Fab-wide collaboration environment.
PHM: Prognostic Health Monitoring PFM: Product Flow Management APC: Advanced Process Control BE: Back End DDR: Defect Density Reduction BEST: Back End Sort & Testing
Our products are designed and configurated as an add-on to the existing systems in order to automate the Engineering Decision-Making Processes.
