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QWiKS -- Increase Your Knowledge At Work!TM
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| Product Features |
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- Real Time WET Diagnostics Report feedback to Fab Modules engineers
- SPC, Western Electric Rules
Automatic Lot disposition and a full diagnostic report Emailed to WET engineers, module engineers and management in less than 5 minutes.
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Built-in Knowledge Base and Data Base
Add disposition rules quickly and easily
In addition to our built-in Knowledge Base library, the engineers can put their best practice knowledge such as
1. missing implant,
2. over/under dose implant,
3. gate oxide integrity (GOI) structures testing using cumulative charge (QBD),
4. breakdown voltage (VBD) testing on intrinsic oxide quality,
5. defect density,
6. oxide thickness,
7. electrical measurements of critical dimensions (CD) for polysilicon and metal patterning,
8. the probe card problems diagnosis,
9. parameter uniformity problems analysis, or even
10. data mining algorithm |
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Drilldownable Report
Lot Trend Chart
Wafer Trend Chart
Wafer Map
| Knowledge Capture using problematic wafer as a template |  |
Automatic SPC Limits Generation
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By viewing the Root Causes Pareto charts and failed parameters Pareto Charts, the engineers will be able to find out which root causes and failed WAT parameters occurred most frequently. The results of Pareto Analysis can be used to improve or avoid mis-processing steps.
| PHM FCS contains 5 sections that are used to save, share, discuss, and report product anomalies. GUI pages with fill-in fields and pull-down menus, makes FCS an easy way to accomplish this reporting task. |  |
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