PHM system contains 4 modules:

(1) Diagnosis module: This is the knowledge rules testing and developing environment.

(2) Failure Classification System module: This module allows the engineers to store their low/zero yield scrapped reports. In addition, the problematic wafers parametric signatures can be captured here to generate the WET disposition rules.

(3) Control module: This is the real time knowledge rules execution engine which will generate the diagnosis summary report within 5 minutes.

(4) Data Analysis module: This module allows the engineers to retrieve diagnosis summary report for any lot in the database. It also provides Pareto analysis for root causes, out of control parameters and out of spec parameters. Besides the pareto analysis, PHM Data analysis module provides many varieties of data analysis graphs such as boxplots, scatter plots, probability plots, x-y plots and histograms.

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